INFICON STM-2XM 2-Channel Rate/Thickness Monitor - Manual (Page 116)

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STM-2XM Operating Manual
5.8.11.1 Raw Status
XtlStat_FLTRINIT . . . . . . . . . . . . . . . 0 ??? CRYSTAL
Frequency filter is filling
XtlStat_OK . . . . . . . . . . . . . . . . . . . . 1 OK CRYSTAL IS GOOD
Averaging filter is full, and rate is meaningful
XtlStat_LOWLIFE . . . . . . . . . . . . . . . 2 LIFE CRYSTAL
Crystal frequency is in range, but not within
bounds
XtlStat_DEAD. . . . . . . . . . . . . . . . . . 3 BAD CRYSTAL
Crystal frequency is out of range
XtlStat_OFF . . . . . . . . . . . . . . . . . . . 4 OFF CRYSTAL
Crystal is not being used
5.8.11.2 Raw Status 2
XS2_normal . . . . . . . . . . . . . . . . . . . 0
Crystal is being used normally
XS2_hold . . . . . . . . . . . . . . . . . . . . . 1
Crystal is in "thick hold" mode, because
substrate shutter is closed or the crystal is in
use as a backup crystal
XS2_coast . . . . . . . . . . . . . . . . . . . . 2
Crystal is in coasting mode; rate and
thickness values are not live (measurement
based) but are incremented/simulated during
time power mode