INFICON STM-2XM 2-Channel Rate/Thickness Monitor - Manual (Page 15)

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STM-2XM Operating Manual
Chapter 1
Introduction and Specifications
1.1 Introduction
STM-2XM rate and thickness monitor (see Figure 1-1 ) will manage single sensor
processes as well as codeposition and alloy processes through five modes of
operation:
 Simple mode (single film mode)
 Backup mode (crystal switching)
 Averaging mode
 Alloy mode
 Independent mode
Independent mode allows STM-2XM to function as two completely separate
monitors with shutter delay. To extend crystal life for thicker films, the Alloy mode
provides a linked shutter delay.
Time/Power allows films to complete even with a crystal failure. STM-2XM displays
accumulated film mass or thickness and can also display a graph of rate, thickness,
or rate deviation.
STM-2XM has eight programmable digital inputs, eight programmable digital
outputs, and four analog outputs.
Figure 1-1 STM-2XM rate/thickness monitor