INFICON STM-2XM 2-Channel Rate/Thickness Monitor User Manual

Page 75

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P1

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STM-2XM Operating Manual

Digital inputs

CH1/CH2 input 1 to 4 function. . . . Determines the function of each of the digital

(relay) outputs (refer to

section 2.2.4 on page

2-6

for details on wiring remote inputs). (See

Table 4-5

.)

Table 4-5 Input functions

Setting

Description

0: Input disabled

Input is ignored

1: Thickness zero

Zero accumulated thickness

2: Open as if from front panel

Open source shutter and in deposit mode

3: Close as if from front panel

Closed source shutter and in monitor mode

4: Select Sensor 1/ Sensor 2 (backup mode)

Switch active crystal

5: Trigger final thickness

Source final thickness

6: Trigger final thicknesses (alloy mode)

All channels final thickness (alloy mode)

7: Sync start channels (alloy mode)

Open substrate shutter and sync start
channels (alloy mode)

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