INFICON STM-2XM 2-Channel Rate/Thickness Monitor User Manual
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STM-2XM Operating Manual
Digital inputs
CH1/CH2 input 1 to 4 function. . . . Determines the function of each of the digital
(relay) outputs (refer to
for details on wiring remote inputs). (See
.)
Table 4-5 Input functions
Setting
Description
0: Input disabled
Input is ignored
1: Thickness zero
Zero accumulated thickness
2: Open as if from front panel
Open source shutter and in deposit mode
3: Close as if from front panel
Closed source shutter and in monitor mode
4: Select Sensor 1/ Sensor 2 (backup mode)
Switch active crystal
5: Trigger final thickness
Source final thickness
6: Trigger final thicknesses (alloy mode)
All channels final thickness (alloy mode)
7: Sync start channels (alloy mode)
Open substrate shutter and sync start
channels (alloy mode)