INFICON STM-2XM 2-Channel Rate/Thickness Monitor - Manual (Page 52)

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STM-2XM Operating Manual
Input 1.1 to 1.4
Input 2.1 to 2.4 . . . . . . . . . . . . . . . . Determines the function of each of the digital
(relay) outputs for Sensor 1 (1.X) and Sensor
2 (2.X) (refer to
section 2.2.4 on page 2-6 for
details on wiring remote inputs). (See Table
3-6 .)
Table 3-6 Input functions
Setting Description
None Input is ignored
Zero Thick Zero accumulated thickness
Open Source Open source shutter and in deposit mode
Close Source Closed source shutter and in monitor mode
Select Xtal Switch active crystal
Terminal Thk Source final thickness
2 Chnl Fnltk All channels final thickness (alloy mode)
Alloy Syncup Open substrate shutter and sync start channels
(alloy mode)