Chapter 2 installation, 1 installation requirements, 1 parts requirements – INFICON STM-2XM 2-Channel Rate/Thickness Monitor User Manual
Page 27: Chapter 2
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STM-2XM Operating Manual
Chapter 2
Installation
2.1 Installation Requirements
2.1.1 Parts Requirements
STM-2XM Monitor
CAUTION
Use the supplied mains power cable.
If this cable must be replaced, the replacement cable
must meet or exceed the ratings of the supplied cable.
One crystal sensor/feedthrough
One Oscillator Kit for each crystal sensor
Quartz crystals appropriate for the application
CAUTION
To maintain proper STM-2XM performance, use only
the 15.2 cm (6 in.) BNC cable that is included to connect
the oscillator to the crystal sensor.
The length of the in-vacuum cable (Front Load and
Sputtering sensors) or electrical conduit tube
(Cool Drawer and Bakeable sensors) should not exceed
78.1 cm (30.75 in.).
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