Chapter 2 installation, 1 installation requirements, 1 parts requirements – INFICON STM-2XM 2-Channel Rate/Thickness Monitor User Manual

Page 27: Chapter 2

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STM-2XM Operating Manual

Chapter 2

Installation

2.1 Installation Requirements

2.1.1 Parts Requirements

STM-2XM Monitor

CAUTION

Use the supplied mains power cable.

If this cable must be replaced, the replacement cable
must meet or exceed the ratings of the supplied cable.

One crystal sensor/feedthrough

One Oscillator Kit for each crystal sensor

Quartz crystals appropriate for the application

CAUTION

To maintain proper STM-2XM performance, use only
the 15.2 cm (6 in.) BNC cable that is included to connect
the oscillator to the crystal sensor.

The length of the in-vacuum cable (Front Load and
Sputtering sensors) or electrical conduit tube
(Cool Drawer and Bakeable sensors) should not exceed
78.1 cm (30.75 in.).

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