INFICON STM-2XM 2-Channel Rate/Thickness Monitor - Manual (Page 71)

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STM-2XM Operating Manual
4.3.3.1 Setup parameters Pane
Sensor setup. . . . . . . . . . . . . . . . . . Main parameter that affects the
choices/modes available (see Table 4-1 ).
Substrate shutter setup . . . . . . . . . The parameter that describes the shutter
assembly of the substrate(s) (see Table 4-2 ).
Tooling and Weights
Tooling X1:S1 . . . . . . . . . . . . . . . . . The ratio between substrate thickness using
Source 1 and Sensor 1 thickness (see
section 7.3, Determining Tooling, on page
7-2
).
Tooling X2: S1 . . . . . . . . . . . . . . . . The ratio between substrate thickness using
Source 1 and Sensor 2 thickness (see
section 7.3, Determining Tooling, on page
7-2
).
NOTE: For independent chambers, set this
value to zero.
Table 4-1 Sensor setup parameter
Sensor Setup Available modes Rate sampling
capable
Backup
capable
1:Single
unshuttered
Simple No No
2:Single shuttered Simple Yes No
3:Dual w/single
shutter
Simple Yes Yes
4:Dual unshuttered Simple, Averaging,
Alloy, Independent
No If mode is
Simple
5:Dual w/dual
shutters
Simple, Averaging,
Alloy, Independent
Yes If mode is
Simple
Table 4-2 Substrate shutter setup parameters
Substrate shutter
setup
Shutter Delay
Thick hold
None N
CH1: Substrate Only for film on Channel 1
CH2: Substrate Only for film on Channel 2
Shared substrate Only allows shutter delay for
one film at a time
Dual substrate Allows dual shutter delay
(alloy shutter delay)