INFICON STM-2XM 2-Channel Rate/Thickness Monitor - Manual (Page 54)

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STM-2XM Operating Manual
3.3.2 Backup
In backup mode, STM-2XM is a single layer, single source monitor using two
sensors; one sensor is a backup for the other sensor. If the active sensor fails,
STM-2XM automatically switches to the backup sensor. The active sensor can be
switched manually by pressing the lower OPEN and CLOSE buttons on the front
panel (refer to
section 3.1.1 on page 3-2 ).
NOTE: The 1 and 2 on these buttons indicate which sensor will be selected (see
Figure 3-10 ).
Figure 3-10 Backup mode
Source Shutter Source
Sensor Shutter
Dual Sensor
Chamber
Substrate Shutter
Substrate
Notice that both
sensors are on. The
arrow indicates the
active sensor
Select
Crystal 1 Crystal 2
Select