INFICON STM-2XM 2-Channel Rate/Thickness Monitor User Manual
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STM-2XM Operating Manual
Analog Out 1 to 4 . . . . . . . . . . . . . . Determines the function of each of the
analog outputs (refer to
for details on wiring analog
outputs). (See
.)
Table 3-4 Analog output functions
Setting
Description
None
Output is disabled
Pos Fscl
+10 V Fixed
Neg Fscl
-10 V Fixed
Remote
Output is computer set value
Ch1 Rdev 1k
Rate Deviation, Channel 1, 1000 Å/s
Ch1 Rdev 10
Rate Deviation, Channel 1, 10 Å/s
Ch1 Rate 1k
Rate, Channel 1, 1000 Å/s
Ch1 Rate 10
Rate, Channel 1, 10 Å/s
Ch1 Thickns
Thickness Recorder, Channel 1, 999 Å
Ch1 Mgthick
Thickness Recorder, Channel 1, 99.9 Å
Ch2 Rdev 1k
Rate Deviation, Channel 2, 1000 Å/s
Ch2 Rdev 10
Rate Deviation, Channel 2, 10 Å/s
Ch2 Rate 1k
Rate, Channel 2, 1000 Å/s
Ch2 Rate 10
Rate, Channel 2, 10 Å/s
Ch2 Thickns
Thickness Recorder, Channel 2, 999 Å
Ch2 Mgthick
Thickness Recorder, Channel 2, 99.9 Е