Specifications of the measuring unit – KEYENCE LT-9001 Series User Manual

Page 151

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9

Chapter

Specifications

Specifications of the Measuring Unit

E LT-9001-IM

Model

LT-9010M/LT-9011M

LT-9010/LT-9011

Measurement range

±0.3 mm

Reference distance

6 mm

Red semiconductor laser

Light source

Wavelength

655 nm

Output

170 µW (IEC)/ 3.0 µW (FDA)

Class (IEC/EN60825-1)

Class 1

Class (FDA)

Class IIa

Spot diameter

Approx. ø2 µm

Scan width/interval

±0 to 1100 µm (6 steps) /1 to 10 µm (4 steps)

Resolution*

1

0.01 µm*

3

Linearity*

1

±0.5% of F.S.

Sampling cycle *

2

640 µs to 356 ms (14 steps)

Temperature characteristics (+20 to +30 °C)

±0.5% of F.S.

Microscope

Available

Not available

function

Field of view

1.3 mm x 1.05 mm

Illumination light source

Infrared LED (Wavelength 870 nm)

Operating ambient light

Incandescent lamp/Fluorescent lamp: 10000 lx or lower

Environmental

Operating ambient

resistance

temperature

0 to +35°C

Specified ambient
humidity

35 to 85%RH (No condensation)

Weight

Approx. 400 g

*1 The value when the measurement target is a mirrored surface object that is measured in displacement mode,

scan width/interval 120 µm/2 µm, and 8-times average

*2 The value when the FINE mode is set to OFF. Sampling cycle may vary slightly from unit to unit.

*3 For LT-9011M and LT-9011, the resolution is 0.3 µm.

9-3

Model

LT-9030M/LT-9031M

LT-9030/LT-9031

Measurement range

±1.0 mm

Reference distance

30 mm

Red semiconductor laser

Light source

Wavelength

655 nm

Output

170 µW (IEC)/ 3.0 µW (FDA)

Class (IEC/EN60825-1)

Class 1

Class (FDA)

Class IIa

Spot diameter

Approx. ø7 µm

Scan width/interval

±0 to 560 µm (6 steps) /1 to 8 µm (4 steps)

Resolution*

1

0.1 µm*

3

Linearity*

1

±0.3% of F.S.

Sampling cycle *

2

640 µs to 187 ms (14 steps)

Temperature characteristics (+20 to +30 °C)

±0.25% of F.S.

Microscope

Available

Not available

function

Field of view

2.5 mm x 2.0 mm

Illumination light source

Infrared LED (Wavelength 870 nm)

Operating ambient light

Incandescent lamp/Fluorescent lamp: 10000 lx or lower

Environmental

Operating ambient

resistance

temperature

0 to +35°C

Specified ambient
humidity

35 to 85%RH (No condensation)

Weight

Approx. 500 g

*1 The value when the measurement target is a mirrored surface object that is measured in displacement mode,

scan width/interval 120 µm/2 µm, and 8-times average

*2 Sampling cycle differs according to the manufacturing variation of individual measuring units.
*3 For LT-9031M and LT-9031, the resolution is 0.3 µm.

LT-9000-M-NO9-E.qxd 12.1.19 8:09 PM ページ9-3

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