INFICON Sensistor ILS500 Leak Detection System - Manual (Page 64)

64 Troubleshooting
ninb63e1-f (1410)
Pressure and Vacuum Sensors
Hardware Test
CONTINUE STOP
Vacuum:
Pressure:
0.00
0.00
Pressure and Vacuum Sensors
Zero Points are OK
bar
bar
Zero points of pressure and vacuum sensors are tested.
Possible results:
• Zero Points are OK
• Vacuum Zero Point not OK
Offset zero point can result in:
• Incorrect gas filling
• Erroneous vacuum or pressure decay results
Evacuation Valve
Hardware Test
CONTINUE STOP
Vacuum:
Pressure:
-0.03
0.00
bar
bar
Evacuation Valve
No Internal Leakage
Evacuation valve is checked for internal leakage.
Possible results:
• No Internal Leakage
• Internal Leakage
Internal leakage can result in:
• False vacuum decay rejects
• Increased tracer gas consumption