INFICON Sensistor ILS500 Leak Detection System - Manual (Page 65)

Troubleshooting 65
ninb63e1-f (1410)
Venturi Pump
Hardware Test
CONTINUE STOP
Vacuum:
Pressure:
-0.88
0.00
bar
bar
Venturi Pump
Max Vacuum OK
Checking max vacuum of Venturi pump.
Possible results:
• Max Vacuum OK
• Poor Max Vacuum
Poor max vacuum can result in:
• Failed pre-evacuation
• Slower evacuation
Manifold Tightness (gross)
Hardware Test
CONTINUE STOP
Vacuum:
Pressure:
-0.82 bar
bar
Manifold Tightness
No Leakage from Outside
0.00
The overall tightness of the manifold is tested using the vacuum raise method.
Possible results:
• No Leakage from Outside
• Leakage from Outside
Leaks in the manifold can result in:
• False vacuum decay rejects
• Increased gas consumption
Minor external leakage will be found later during the
gas test step.