INFICON Sensistor ILS500 Leak Detection System - Manual (Page 77)

Maintenance Instructions 77
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12.3 Maintenance
12.3.1 Tools and Safety Equipment
When performing regular maintenance of the ILS500 the following equipment is
needed.
12.3.2 Interior View
Description Note
Allen Keys (Hexagonal 3 and 4 mm)
Torx Key (T25)
Screwdriver (Philip 1 or Pozidrive 1
Protective Eyewear When performing tooling output
test.
Protective Ear Plugs When performing tooling output
test.
1 Pilot Valve 6
2 Pilot Valve 1
3 Venturi Pump (Ejector)
4 Evacuation Valve
1 2 3
4
5
6
10
7
8 9