INFICON Sensistor ILS500 Leak Detection System - Manual (Page 78)

78 Maintenance Instructions
ninb63e1-f (1410)
Pilot Valve Ramp
12.3.3 Removing the Cover
1 Use a T25 key to remove the two screws holding the right hand cover (next to gas
ports).
2 Slide the cover back and lift it off. Rock the rear end of the cover up and down a few
times to loosen. See below.
5 Tracer Gas Fill Valve
6 Test Port Valve 2
7 Vacuum Sensor Control Valve
8 Pressure Sensor (HP model only)
9 Vacuum Sensor
10 Pressure Sensor
Position Valve
5A+6A Main Air Valve
5B+6B Venturi Pump Supply
4A Evacuation Valve
4B Tracer Gas Fill Valve
3A Test Port 2 Valve
3B Sensor Protection Valve
2A Tooling Valve 1
2B Tooling Valve 2
1A Tooling Valve 3
1B Tooling Valve 4