INFICON Sensistor ILS500 Leak Detection System - Manual (Page 66)

66 Troubleshooting
ninb63e1-f (1410)
Vacuum Sensor Valve
Hardware Test
CONTINUE STOP
Vacuum:
Pressure:
0.00 bar
bar
Vacuum Sensor Valve
Valve works!
0.00
This checks that the valve shuts to protect vacuum sensor before filling.
Possible results:
• Valve works
• Faulty!
Malfunction can result in:
• Damage to vacuum sensor
• Failed pre-evacuation
Tracer Gas Fill Valve
Hardware Test
CONTINUE STOP
Vacuum:
Pressure:
0.00 bar
bar
Tracer Gas Fill Valve
No Internal Leakage
0.00
The step tests the gas fill valve for internal leakage by registering pressure rise behind
the valve.
Possible results:
• No Internal Leakage
• Internal Leakage
Internal leakage can result in:
• Erroneous pressure decay results
• False vacuum decay rejects increased gas consumption