INFICON Sensistor ILS500 Leak Detection System - Manual (Page 76)

76 Maintenance Instructions
ninb63e1-f (1410)
12.2 Maintenance Plan
*Depends on the amount of particulates in the objects tested. Metal burrs and other
sharp particles will wear the valves down, requiring shorter maintenance intervals.
Part Interval Action
Venturi Pump 3 months Perform a Hardware Test.
Check Ultimate Vacuum.
Clean venturi nozzles when necessary.
Evacuation, Fill and
Test Port 2 Valves 3-6 months* Perform a Hardware Test.
Check condition of valves.
Replace or clean valves when necessary.
Vacuum Sensor Valve 12 months Perform a Hardware Test.
Check condition of valve.
Replace or clean valve when necessary.
Pilot Valves 12 months Set PLC in STOP position.
Remove output hose from load side and
block with finger.
Change valve if pressure builds.
Gas Sensor 3 months Check sensitivity and response time.
See manual for ISH2000 and/or active
probe used.