9 connecting the argon supply – INFICON CMS5000 Monitoring System User Manual

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CMS5000 Operating Manual

3.9 Connecting the Argon Supply

It is the responsibility of the user to provide the argon supply. An ultra high purity
source of argon (99.99999%) is required for optimal operation of the MAID. The
included regulator is preset at the factory to the required pressure (90 psi). Connect
the argon supply to the CMS5000 using the included Teflon argon supply line and
the quick connect valve. The fitting for the quick connect is located on the left side
of the mounted analytical module. See

Figure 3-16

.

Figure 3-16 Connecting the Argon Supply to the CMS5000

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