INFICON SQC-310 Thin Film Deposition Controller - Manual (Page 10)

Chapter 1 Quick Start
1-4
1.3 System Connection s
S e nsor
F ee d throu gh
In-V a c
C a ble
6" B N C C a ble
O scilla tor
S o urce
S h utter
G ro u nd W ire
E vap oration S up ply
O u tp ut C o ntrol Inp ut
B N C
C ab les
System Components
Sensor Holds the quartz crystal used to measure rate and thickness.
Crystals must be replaced occasionally.
In-Vac Cable A coaxial cable that connects the sensor to the feedthrough.
Feedthrough Provides isolation between vacuum and atmosphere for
electrical and cooling lines.
6” BNC Cable Provides a flexible connection from the feedthrough to the
oscillator. Keep this cable as short as possible.
Oscillator Contains the electronics to operate the quartz crystal. Total
cable length to the crystal should be under 40”.
Sensor Input
BNC Cable Connects the oscillator to the SQC-300 input. Lengths up to
100’ are acceptable.
Control Output
BNC Cable Connects the SQC-300 output to the evaporation source’s
control voltage input. Keep the length below 10’.
Ground Wire A wire, typically braided, that connects the vacuum system to
the SQC-300 ground terminal. Important for noise rejection.