INFICON SQC-310 Thin Film Deposition Controller - Manual (Page 22)

Chapter 2 Operation
2-3
With Material highlighted, press Edit to scroll through the list of available materials.
Select the desired material and press Enter. You could also change the Density and Z-
Factor for the selected material, but it is unlikely those values are wrong. To add a new
material or edit the name of an existing material, you must use the SQC-300 setup
software.
Film conditioning adjusts the output power level to achieve a desired material state
before and after deposition. Press Film Conds to enter the film conditioning menu.
R a m p 1 T im e
R a m p 2 P o w e r
R a m p 2 T im e
S o a k 2 T im e
F e e d P o w e r
R a m p T im e
F e e d T im e
Id le P o w e r
R a m p T im e 0 :0 0 :0 0
0 .0
0 :0 0 :0 0
0 :0 0 :0 0
0 .0
0 :0 0 :0 5
0 :0 0 :0 5
5 0 .0
0 :0 0 :1 0
%
h :m m :s s
h :m m :s s
h :m m :s s
h :m m :s s
%
h :m m :s s
F ilm C o n d itio n in g M e n u
T o
M a in
P re v
M e n u
E d it
P ro c e s s 1 E d itin g : F ilm 1
P a ra m e te r V a lu e U n its
R a m p 1 P o w e r 2 5 .0 %
S o a k 1 T im e 0 :0 0 :0 5 h :m m :s s
%
h :m m :s s
Ramp1 starts at 0% power and increases the power during Ramp1 Time to the Ramp 1
power level. Set the Ramp 1 Power and Time to gradually bring the material to a near
molten state. Set the Soak 1 Time to a value that will allow the material to
homogeneously achieve that state. Ramp 2 is used to slowly bring the material to a
power level that nearly matches the desired deposition power. Use Soak 2 to hold the
material at that level until deposition (i.e. rate control) begins.
If you use wire feed to replenish material after deposition, set the Feed Power and times
as required. The idle conditioning phase typically ramps output power back toward zero
at the end of a process.
From the Film Conds menu, press Prev Menu to return to the main Film Params menu.