INFICON SQC-310 Thin Film Deposition Controller - Manual (Page 74)

Chapter 5 Communications
5-6
4 Thickness Limit 16. Ramp1 Time
5 Start Mode 17. Ramp2 Enable
6 Output 18. Ramp2 Start
7 Max. Power 19. Ramp2 Rate
8 Slew rate 20. Ramp2 Time
9 Sensor 1 21. Film Number
10 Sensor 2 22. Next Layer
11 Sensor 3 23. Codep Layer
12 Sensor 4
Example: Assume that Process 1 has two layers. The first layer being a Codep
layer using two outputs. The second a normal layer, using just one output.
Get the Actual Layer count for the process: C1? 4
The response will be 3. Get the First Layer of the process: C1? 3
If the first layer is Layer #1 (of 250 possible layers) the return is: 3,1
Now get the Next Layer for Layer 1: D1? 22
Because this is a Codep layer the response will be: 22,-1
We have to check the Codep Layer parameter: D1? 23
The response might that Layer 2 is the Codep layer: 23, 2
Now read the next Layer for Layer 2: D2? 22
The response might be Layer 3: 22,3
At this point you could read the Next Layer parameter for Layer 3 (it will be –1), or stop
(since we already know there are three layers).