INFICON SQC-310 Thin Film Deposition Controller - Manual (Page 42)

Chapter 3 Menus
3-4
3.3 Main Screen, Menu 3
Menu 3 can be accessed only while the process is stopped. This menu gives access to
process, film, and system setup parameters that cannot be altered while a process is
running.
To change these parameters when a process is running: Stop the process; modify the
parameters; then restart the process at the desired layer.
The table below describes the function of each SoftKey on Main Screen Menu 3.
Next
Menu Sequences through each of the three Main Screen menus.
Process
Menu A process is a sequence of layers of deposited film(s). The
Process Menu selection allows you to build and edit the
sequence of process layers.
Film
Menu A film is basically a material plus the setup information
necessary to deposit that material. Settings on the Film Menu
include pre/post conditioning, deposition error controls, and the
physical chamber setup for that material.
System
Params System parameters control the overall operation of the SQC-
300. Tooling, crystal frequency, and operating modes are
examples of settings found on the System Parameters Menu.
The remainder of this chapter provides a detailed explanation of each sub menu and its
settings.