INFICON SQC-310 Thin Film Deposition Controller - Manual (Page 47)

Chapter 3 Menus
3-9
3.6 Layer Edit Menu
Each layer consists of a film (i.e. a material), plus the deposition rate and thickness that
are desired for the layer. The Layer Edit Menu provides access to these layer
parameters:
Fnl Thk
Thickness Limit
Start Mode
Ramp1
Ramp2 Disabled
Disabled
Manual
50.0
0.000
En/Dis
Auto/Man.
%
k/A
Layer Edit Menu
To
Main
Prev
Menu
Edit
Process 1 -> Layer 1 -> Film 1
Parameter Value Units
Init Rate 0.0 A/s
Time Setpoint 0:00:00 h:mm:ss
En/Dis
To
Main Returns to the Main Menu.
Prev
Menu Returns to the Layer Select Menu.
Edit Selects the highlighted parameter for edit. SoftKey functions
change to:
Next: Store parameter and move to next for editing.
Cancel: Stop editing and undo changes to selected parameter.
Enter: Stop editing and save values for selected parameter.
Control Knob: Turn to adjust value. Push to store value and
move to next parameter.
Control Knob Scrolls through the list of layer parameters.
A description of each parameter on the Layer Edit Menu follows:
Initial Rate: The beginning rate of deposition for this layer.
Final Thickness: The desired final thickness of this layer. The deposition phase of this
layer will end when this thickness is reached.
Time Setpoint: Sets an arbitrary time, after deposition begins, when the time setpoint
relay is activated.