INFICON SQC-310 Thin Film Deposition Controller - Manual (Page 12)

Chapter 1 Quick Start
1-6
1.5 Menus
At power up the SQC-300 briefly displays initialization and version information, then the
Main screen.
Note: If you are prompted for a password, use the switches along the left of the screen
to enter the password. The top switch is “1”, the bottom switch is “6.” See the System
Parameters section of this manual for password setup information.
M a i n S c r e e n
Z e r o
N e x t
L a y e r
N e x t
M e n u
Q u i c k
E d i t
A u t o /
M a n u a l
P r o c e s s 1 : L a y e r 1 o f 1 R u n # : 0
S t a r t
0 . 0
5 0 . 0
1 0 0 . 0
0 . 0 6 . 2 1 2 . 5 1 8 . 8 2 5 . 0
P o w e r (% v s . T im e )
O u t #
1
2
3
4
R a t e ( A / S )
0 . 0 0
0 . 0 0
0 . 0 0
0 . 0 0
D e v ( % )
0 0 . 0
0 0 . 0
0 0 . 0
0 0 . 0
T h ic k ( k A )
0 . 0 0 0
0 . 0 0 0
0 . 0 0 0
0 . 0 0 0
P o w ( % )
0 . 0
0 . 0
0 . 0
0 . 0
S t o p p e d 0 : 0 0 : 0 0
The first line of the Main screen shows the name of the currently selected process.
After the process name are the layer that will run when the Start SoftKey is pushed, and
the total number of layers in the process. Further to the right is the number of times this
process has been run.
The second line of the Main screen is a status line. It displays the current phase of the
deposition cycle, and other status or error messages. When the process is running, the
right side of this line shows the process elapsed time.
Three graphs are possible: rate, rate deviation, and output power. The graphs scale the
vertical axis and scroll the horizontal axis based on the data displayed.
Below the graph are two lines that show deposition readings (four lines if the option card
is installed). This section shows current rate, rate deviation, thickness, and output
power as shown above. Alternatively it can show measured rate and thickness versus
rate and thickness setpoints.