INFICON SQC-310 Thin Film Deposition Controller - Manual (Page 30)

Chapter 2 Operation
2-11
2.7 Running a Process
Once a Process is defined with the desired Layers, and the sensors and source supply
are properly connected, the deposition process is ready to run. This section describes
the steps to select, start, and stop a process.
There are three Main Menu screens while the process is stopped (two when it is
running). Pressing the Next Menu SoftKey accesses the three screens. Next Menu is
the first SoftKey in each of the three menus. Likewise, Start/Stop is the last SoftKey on
each Main Menu. Main Menu 1 displays the SoftKeys used to control the process.
M a i n S c r e e n
Z e r o
N e x t
L a y e r
N e x t
M e n u
Q u i c k
E d i t
A u t o /
M a n u a l
P r o c e s s 1 : L a y e r 1 o f 1 R u n # : 0
S t a r t
0 . 0
5 0 . 0
1 0 0 . 0
0 . 0 6 . 2 1 2 . 5 1 8 . 8 2 5 . 0
P o w e r ( % v s . T i m e )
O u t #
1
2
3
4
R a t e ( A / S )
0 . 0 0
0 . 0 0
0 . 0 0
0 . 0 0
D e v ( % )
0 0 . 0
0 0 . 0
0 0 . 0
0 0 . 0
T h i c k ( k A )
0 . 0 0 0
0 . 0 0 0
0 . 0 0 0
0 . 0 0 0
P o w ( % )
0 . 0
0 . 0
0 . 0
0 . 0
S t o p p e d 0 : 0 0 : 0 0
The Quick Edit SoftKey (available while the process is running) provides easy access
to the most commonly set process parameters.
Fnl Thk
I Term
D Term
Max. Power
Slew Rate
Material
Density 2.73
Aluminum
99.0
99.0
0.0
0.1
3.0
gm/cm^2
%
Sec.
Sec.
kA
Quick Edit Menu
Next
Layer
To
Main
Edit
Process 1 --> Layer 1 --> Film 1
Parameter Value Units
Init Rate 0.2 A/s
P Term 70 None
Zfactor 1.00
%
Press Next Layer and Prev Layer on the Quick Edit screen to review each layer.
Press To Main to return to the Main screen.