INFICON SQC-310 Thin Film Deposition Controller - Manual (Page 33)

Chapter 2 Operation
2-14
While the process is running, a Stop Layer SoftKey is shown. Pressing Stop Layer
temporarily halts the current Layer.
L a y e r S t o p p e d
Z e r o
N e x t
L a y e r
N e x t
M e n u
Q u ic k
E d i t
A u t o /
M a n u a l
P r o c e s s 1 : L a y e r 1 o f 1 R u n # : 1
S t a r t
0 . 0
5 . 0
1 0 . 0
0 . 0 6 . 2 1 2 . 5 1 8 . 8 2 5 . 0
R a t e ( A / s v s . T im e )
O u t #
1
2
3
4
R a t e ( A / S )
4 . 9 1
0 . 0 0
0 . 0 0
0 . 0 0
D e v ( % )
- 1 . 8
0 0 . 0
0 0 . 0
0 0 . 0
T h ic k ( k A )
0 . 0 9 5
0 . 0 0 0
0 . 0 0 0
0 . 0 0 0
P o w ( % )
7 5 . 0
0 . 0
0 . 0
0 . 0
L a y e r S t o p p e d 0 : 4 2 : 0 0
Start repeats the stopped layer, beginning with preconditioning. Next Layer allows you
to select another layer to start.
Note: Pressing the Abort SoftKey on Main Menu 2 at any time completely aborts the
process.
Spend some time in Simulate mode verifying that the process sequences through each
phase of each layer as expected. If not, use the Quick Setup, Process, and Film menus
to make corrections.
Because the process is being “simulated,” some parameters will not be correct for your
process (particularly PID). However, you can become familiar with the effect of each
parameter in this simulated process. Also practice using the Next Menu options,
especially Auto/Manual modes.
Once you have verified the process in Simulate Mode, you may return to the System
Params menu and turn Simulate OFF to start testing your process. Use the next
section to finalize the loop PID settings.