Appendix interfacing to an mdc sweeper – INFICON SQC-310 Thin Film Deposition Controller User Manual

Page 93

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Appendix

Interfacing to an MDC Sweeper

BCD I/O (Sigma 902-027)
Wiring between the SQC 300 series controllers (refered to below as SQC-3XX) ) and an
MDC sweeper to select Pattern 1 to 8:

SQC-3XX

Sweeper

Pin 14------------->-------------- Pin 8

OutX Pocket Bit1

Pin 1 -------------->-------------- Pin 7

OutX Pocket Bit2

Pin 3 -------------->-------------- Pin 6

OutX Pocket Bit3

Pin 5 --------------<-------------- Pin 12

Process Stopped

Pin 7 --------------<-------------- Pin 13

SourceX Enable

Pin 15,2,4,6,8------------------- Pin 16

Common

On the SQC-3XX System Params Menu, set Pocket Relay to Multi. In the System I/O
menu set Relay 1 to OutX Pocket Bit 1, Relay 2 to OutX Pocket Bit 2, and Relay 3 to
OutX Pocket Bit 3. Set Relay 4 to Process Stopped and Realy 5 to SourceX Enable.

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