Appendix interfacing to an mdc sweeper – INFICON SQC-310 Thin Film Deposition Controller User Manual
Page 93
Appendix
Interfacing to an MDC Sweeper
BCD I/O (Sigma 902-027)
Wiring between the SQC 300 series controllers (refered to below as SQC-3XX) ) and an
MDC sweeper to select Pattern 1 to 8:
SQC-3XX
Sweeper
Pin 14------------->-------------- Pin 8
OutX Pocket Bit1
Pin 1 -------------->-------------- Pin 7
OutX Pocket Bit2
Pin 3 -------------->-------------- Pin 6
OutX Pocket Bit3
Pin 5 --------------<-------------- Pin 12
Process Stopped
Pin 7 --------------<-------------- Pin 13
SourceX Enable
Pin 15,2,4,6,8------------------- Pin 16
Common
On the SQC-3XX System Params Menu, set Pocket Relay to Multi. In the System I/O
menu set Relay 1 to OutX Pocket Bit 1, Relay 2 to OutX Pocket Bit 2, and Relay 3 to
OutX Pocket Bit 3. Set Relay 4 to Process Stopped and Realy 5 to SourceX Enable.