INFICON SQC-310 Thin Film Deposition Controller - Manual (Page 41)

Chapter 3 Menus
3-3
3.2 Main Screen, Menu 2
The table below describes the function of each SoftKey on Main Screen, Menu 2.
Next
Menu Sequences through each of the three Main Screen menus.
Next
Graph Sequences through the graph options for the Main Screen.
Choose between Rate, Rate Deviation, and Power graphs.
The Y axis of the Rate Deviation graph can be scaled in the
System Params menu. A fourth “graph” screen displays rate,
thickness, and power in large text format for easy viewing.
Next
Displays Toggles between data display options at the bottom of the
Main Screen. The first display option shows Rate, Rate
Deviation, Thickness, and Power readings. The second option
shows Rate measurements in the first column and Rate
setpoints in the second column. Thickness measurements are
shown in the third column, then Thickness setpoints in the
fourth.
Sensor Info Replaces the Main Screen with the Sensor screen.
Sensor Info
Exit
Sensor #
Enable
Freq
Life
Next
Layer Sequences through each process layer. Use this key to start
or restart the process at any layer.
Start
Layer Each layer in a process can be defined as Auto Start or Manual
Start. Auto Start layers begin immediately on completion of the
previous layer. Manual start layers wait for the operator to
press Start Layer. Only visible when waiting to Manual Start.
Start/Stop Starts or halts the current process. Sets all outputs to zero.