INFICON SQC-310 Thin Film Deposition Controller - Manual (Page 82)

Appendix
A. Material Parameters
In the table below, an * is used to indicate that the material’s Z Factor is not known. A
method of determining Z Factor empirically follows the materials table.
Formula Density Z-Ratio Material Name
Ag 10.500 0.529 Silver
AgBr 6.470 1.180 Silver Bromide
AgCl 5.560 1.320 Silver Chloride
Al 2.700 1.080 Aluminum
Al
2
O
3
3.970 0.336 Aluminum Oxide
Al
4
C
3
2.360 *1.000 Aluminum Carbide
AlF
3
3.070 *1.000 Aluminum Fluoride
AlN 3.260 *1.000 Aluminum Nitride
AlSb 4.360 0.743 Aluminum Antimonide
As 5.730 0.966 Arsenic
As
2
Se
3
4.750 *1.000 Arsenic Selenide
Au 19.300 0.381 Gold
B 2.370 0.389 Boron
B
2
O
3
1.820 *1.000 Boron Oxide
B
4
C 2.370 *1.000 Boron Carbide
BN 1.860 *1.000 Boron Nitride
Ba 3.500 2.100 Barium
BaF
2
4.886 0.793 Barium Fluoride
BaN
2
O
6
3.244 1.261 Barium Nitrate
BaO 5.720 *1.000 Barium Oxide
BaTiO
3
5.999 0.464 Barium Titanate (Tetr)
BaTiO
3
6.035 0.412 Barium Titanate (Cubic)
Be 1.850 0.543 Beryllium
BeF
2
1.990 *1.000 Beryllium Fluoride
BeO 3.010 *1.000 Beryllium Oxide
Bi 9.800 0.790 Bismuth
Bi
2
O
3
8.900 *1.000 Bismuth Oxide
Bi
2
S
3
7.390 *1.000 Bismuth Trisuiphide
Bi
2
Se
3
6.820 *1.000 Bismuth Selenide
Bi
2
Te
3
7.700 *1.000 Bismuth Telluride
BiF
3
5.320 *1.000 Bismuth Fluoride
C 2.250 3.260 Carbon (Graphite)
C 3.520 0.220 Carbon (Diamond)
C
8
H
8
1.100 *1.000 Parlyene (Union Carbide)