INFICON SQC-310 Thin Film Deposition Controller - Manual (Page 79)

Chapter 5 Communications
5-11
Get Output Deviation
Command: Q
Description: Returns the % deviation of the requested output.
Parameters: Output Number
Example: To Get Output 1 deviation, send: Q1
The return string is of the form: 1.00
Get/Set Output Power
Command: S
Description: Returns output power. Sets outputs to PID loop mode or manual mode.
In manual mode, also sets the output power. Power is sent as an integer value.
Parameters: Output Number, Power
Example: To Get Output 2 power send: S? 2
To Set Output 2 to 50.0% of full scale send: S2 500
Note: This places other outputs in Manual mode at their current power.
To set all outputs to PID loop control send: S0
Set Active Process
Command: T
Description: Sets the currently selected process. If a process is running, it is not
changed and an E response status is returned.
Parameters: Process Number
Example: To set the process to Process 1 send: T1