INFICON SQC-310 Thin Film Deposition Controller - Manual (Page 18)

Chapter 1 Quick Start
1-12
1.8 Depositing a Film
Note: You can simulate the steps below, without actually depositing a film, by going to
the System Params Menu and selecting Simulate Mode ON. Simulate mode is useful
for testing processes before applying power to the evaporation supply. See Section 3.6
for detailed System Parameters Menu information.
Verify Sensor
Operation Press Next Menu until the Sensor Info option is shown.
Press Sensor Info to display the quartz sensor readings.
Sensor 1 should be ON and display a % life of over 50%. If
not, check your sensor connections (Section 1.3), and refer to
Min/Max Frequency (Section 3.6).
Press Exit to return to the main screen.
Show
Power Graph Press the Next Graph SoftKey until the graph shows Power (%
vs. Time).
Verify Output
Operation Press the Next Menu SoftKey until the Auto/Manual SoftKey is
displayed. Now press Auto/Manual until Manual/Auto is
displayed. Press Start to begin deposition in manual mode.
Slowly turn the control knob to increase the control voltage to
your evaporation supply. Verify that the Power(%) reading for
Output 1 (lower right, below graph) approximates the actual
output of your evaporation supply. If not, check your hookup
(Section 1.3), and refer to Scale Voltage (Section 3.6).
Caution: Observe the output power versus your evaporation
supply’s actual output. If there is a problem, press the Stop
SoftKey immediately.
Enter
Auto Mode Press the Next Menu key until the Manual/Auto SoftKey is
shown. Press Manual/Auto to change the SoftKey display to
Auto/Manual. This places the output under PID deposition
control.
Press Stop at any time to halt deposition and set output power
to zero.
Please take time to review the remainder of this manual for detailed operational,
programming, and safety information.