INFICON SQC-310 Thin Film Deposition Controller - Manual (Page 90)

Appendix
Display
Graphs Rate, Deviation, Power
Readouts Thickness, Rate, Power
Process Parameters (a Process is a sequence of layers)
# Processes 100
# Films 50
# Layers (total all processes) 1000
Layer Parameters (Layer is a Film, plus these values)
Initial Rate 0.0 to 99.9 A/sec.
Final Thickness 0.0 to 99.999 kA
Time Setpoint 0 to 30000 sec.
Thickness Limit 0.0 to 99.999 kA
Start Mode Auto/Manual
Output Select 1, 2, 3, 4
Max Power 0.0 to 100.0 %
Slew Rate 0.0 to 100.0 %/sec.
Sensor Select (1 to 4) On/Off
# Rate Ramps 2
Rate Ramp Start 0.0 to 99.999 kA
Rate Ramp Time 0 to 1000 sec.
New Rate 0.0 to 99.9 A/sec.
Film Parameters (Film is a Material, plus these values)
Material 100 stored
Density 0.40 to 99.99 gm/cm
3
Z-Factor 0.100 to 9.900
P Term 1 to 9999
I Term 0 to 99.9 sec.
D Term 0 to 99.9 sec.
Tooling 10 to 400
Pocket 1 to 8
Crystal Quality Disabled to 30%
Crystal Stability Disabled to 5000 Hz
Crystal Fail Mode Halt or Timed Power
Ramp1, Ramp2, Feed Ramp, Feed, Idle Ramp Time 0 to 30000 sec.
Soak1, Soak2, Feed, Idle Power 0.0 to 100.0 %
Shutter Delay Time 0 to 200 sec.
Shutter Delay Error 0.0 to 30.0 %
Control Error Ignore/Stop/Hold
Control Error Setting 0 to 30.0 %
Rate Sampling Continuous/Time/Accuracy
Sample Time 10.0 to 999.0 sec.
Hold Time 10.0 to 999.0 sec.