INFICON SQC-310 Thin Film Deposition Controller - Manual (Page 4)

Table of Contents
Chapter 1 - Quick Start................................................................................................. 1-1
1.0 Introduction ......................................................................................................... 1-1
1.1 Front Panel ......................................................................................................... 1-2
1.2 Rear Panel.......................................................................................................... 1-3
1.3 System Connections........................................................................................... 1-4
1.4 Installation .......................................................................................................... 1-5
1.5 Menus................................................................................................................. 1-6
1.6 Thin Film Deposition Overview ........................................................................... 1-8
1.7 Building a Process.............................................................................................. 1-9
1.8 Depositing a Film .............................................................................................. 1-12
Chapter 2 - Operation................................................................................................... 2-1
2.0 Introduction ......................................................................................................... 2-1
2.1 Definitions........................................................................................................... 2-1
2.2 Defining a Film.................................................................................................... 2-2
2.3 Defining a Process.............................................................................................. 2-5
2.4 Defining a Layer.................................................................................................. 2-7
2.5 Sensor Setup ...................................................................................................... 2-8
2.6 Source Setup .................................................................................................... 2-10
2.7 Running a Process ........................................................................................... 2-11
2.8 Loop Tuning...................................................................................................... 2-15
2.9 Troubleshooting................................................................................................ 2-17
Chapter 3 - Menus ....................................................................................................... 3-1
3.0 Introduction ......................................................................................................... 3-1
3.1 Main Screen, Menu 1.......................................................................................... 3-2
3.2 Main Screen, Menu 2.......................................................................................... 3-3
3.3 Main Screen, Menu 3.......................................................................................... 3-4
3.4 Quick Setup Menu .............................................................................................. 3-5
3.5 Process Menus ................................................................................................... 3-7
3.6 Layer Edit Menu.................................................................................................. 3-9
3.7 Cut/Copy and Insert Menus ..............................................................................3-12
3.8 Film Menus ....................................................................................................... 3-14
3.9 System Parameters Menu ................................................................................ 3-21
3.10 Relay and Input Setup .................................................................................... 3-24
Chapter 4 - Maintenance.............................................................................................. 4-1
4.0 Introduction ......................................................................................................... 4-1
4.1 Cleaning ............................................................................................................. 4-1
4.2 Software Upgrades ............................................................................................. 4-2
4.3 Option Card Installation ...................................................................................... 4-3
4.4 Half Rack Adapter Installation ............................................................................ 4-3
4.5 Full Rack Extender Installation ........................................................................... 4-4