INFICON SQC-310 Thin Film Deposition Controller - Manual (Page 73)

Chapter 5 Communications
5-5
Get/Set Process Parameters
Command: C
Description: Gets/sets the four process parameters. In the parameters list below,
Number Layers is the number of layers in a process, counting Codep layers as 1 layer.
Actual Layers is the total number of layers. For example, a process with one Codep
layer (using two films) would have Number Layers=1 and Actual Layers=2.
The First Layer is the layer number of the first layer in the process. Subsequent layers
are found by reading the Next Layer parameter (see the D command, Layer
Parameters).
Parameters: 1 Process Name 3 First Layer
2 Number Layers 4 Actual Layers
Example: To Get Process 1 name, send: C1? 1
The return string would be of the form: AnyName
To Set the parameter, send: C1 1,AnyName
Note: Unlike Get/Set Film Parameters, you can only get/set one process parameter at a
time.
Get/Set Layer Parameters
Command: D
Description: Most layer parameters are directly related to a setting on the layer edit
screen. You can get/set multiple layer parameters as explained in Film Parameters.
The Next Layer and Codep Layer parameters need some explanation. A process is
formed by a “linked list” of layers. We have already seen that Layer 1 in a process is
found in the First Layer (process parameter). That layer has a Next Layer (layer
parameter) that points to the next layer in the process. This continues until the last
layer in the process, where the Next Layer parameter will be –1.
Codep layers are handled similarly. If a layer is one of a set of Codep layers,
then it’s Next Layer Parameter will be -1. However, it’s Codep Layer parameter will be
a valid Layer Number. See the example below.
Parameters: 1 Init Rate 13. Ramp1 Enable
2 Final Thickness 14. Ramp1 Start
3 Time SetPoint 15. Ramp1 Rate