INFICON SQC-310 Thin Film Deposition Controller - Manual (Page 77)

Chapter 5 Communications
5-9
Get Readings
Command: K
Description: Returns the phase time and sensor or output readings for all installed
channels.
Parameters: 1 = Output Readings 2 = Sensor Readings
Example: To Get Output readings, send: K1
The return string is of the form:
Time Rate1 Dev1 Thick1 Power1 Rate2 Dev2 Thick 2 etc.
To Get Sensor readings, send: K2
The return string is of the form:
Time Rate1 Thick1 Frequency1 Rate2 Thick 2 etc.
Get Sensor Rate
Command: L
Description: Returns the sensor rate for the requested sensor.
Parameters: Sensor Number
Example: To Get Sensor 1 rate, send: L1
The return string is of the form: 1.00
Get Output Rate
Command: M
Description: Returns the average rate of all sensors assigned to the requested output.
Parameters: Output Number
Example: To Get Output 1 rate, send: M1
The return string is of the form: 1.00