INFICON SQC-310 Thin Film Deposition Controller - Manual (Page 17)

Chapter 1 Quick Start
1-11
Edit
Layer With Layer 1 selected, press Edit to display the Layer Edit
menu for Layer 1.
F n l T h k
T h ic k n e s s L im it
S t a r t M o d e
O u t p u t
M a x . P o w e r 9 0 . 0
O u t 1
M a n u a l
0 . 0 0 0
0 . 1 0 0
O u t 1 / O u t 2
A u t o / M a n .
k A
k / A
L a y e r E d i t M e n u
T o
M a i n
P r e v
M e n u
E d i t
P r o c e s s 1 - > L a y e r 1 - > F ilm 1
P a r a m e t e r V a lu e U n it s
I n it R a t e 1 0 . 0 A / s
T im e S e t p o in t 0 : 0 0 : 0 0 h : m m : s s
%
O f f
O n
O f f
D is a b le d
S e n s o r 2
S e n s o r 4
S e n s o r 3
R a m p 1
S le w R a t e
S e n s o r 1
O f f
9 0 . 0
O n / O f f
O n / O f f
E n / D is
O n / O f f
O n / O f f
%
Edit Menu
Operation To edit a setting in any menu, turn the control knob to scroll to
the desired setting, then press the Edit SoftKey. The cursor
moves to the setting value, and the SoftKey functions change
to show:
Next: Store the parameter and move to next parameter for
editing.
Cancel: Stop editing and return the selected parameter to its
previous value.
Enter: Stop editing and save values for selected parameter.
In Edit mode, adjust the control knob to set the desired
parameter value.
Edit
Layer 1 Spend some time navigating through the Layer 1 parameters
and editing values. When you are comfortable, be sure your
values for Layer 1 match those shown above.
Press Main Menu to return to the Main Screen.
We have completed the design of a single layer process.