Chapter 5 communications – INFICON SQC-310 Thin Film Deposition Controller User Manual
Page 75
Chapter 5
Communications
5-7
Delete All Layers
Command:
E
Description: Deletes all 250 layers! Most often used to clear the entire inreument in
preparation for downloading a new list.
Parameters: None
Get/Set Material Parameters
Command:
F
Description: Gets/Sets the parameters of the 100 stored materials.
Parameters:
1.
Material Name
3.
Zfactor
2.
Density
Example:
To Get Material 1 name, send: F1? 1
The return string would be of the form: Aluminum
To Set the parameter you would send: F1 1,AnyName
Note: You can only get/set one material parameter at a time.
Get/Set Input Parameters
Command:
G
Description: Gets/Sets the logical function of each of the 16 digital inputs.
Parameters:
1
Start Process
32
Soak Hold
2
Abort Process
33
Zero Thickness
3
Start Layer
34
Zero Time
4
Stop Layer
35
Out1 Pocket Ready
5
Start Next Layer
36
Out2 Pocket Ready
6
Force Final Thick
37
Out3 Pocket Ready
7-31
Start Process 1-25
38
Out4 Pocket Ready
39
Not Used
Example:
To Get Input 1 and Input 2 functions, send: G? 1 2