Chapter 5 communications – INFICON SQC-310 Thin Film Deposition Controller User Manual
Page 76
Chapter 5
Communications
5-8
The return string for Start Layer and Stop Layer would be: 1,3 2,4
To Set the same parameters you would send: G1 1,3 2,4
Get/Set Relay Parameters
Command:
H
Description: Gets/Sets the logical function of each of the 16 relays.
Parameters:
1
Source 1 Shutter
21
Max. Power
2
Source 2 Shutter
22
Stopped
3
Source 3 Shutter
23
Time Setpoint
4
Source 4 Shutter
24
Thick Limit
5-8
Sensor 1-4 Shutter
25
Final Thickness
9-12
Sensor 1-4 Fail
26
Dual Xtal 1/2 Shutter
13
All Crystals Good
27
Dual Xtal 3/4 Shutter
14
All Crystals Bad
28-35 Out1 Pocket 1-8
15
Process Hold
36-43 Out1 Pocket 1-8
16
Deposit Phase
44-51 Out1 Pocket 1-8
17
PreCond Phase
52-59 Out1 Pocket 1-8
18
SoakHold Phase
60
Not Used
19
Process Active
20
Manual Mode
Example:
To Get Relay 1 and Relay 2 functions, send: H? 1 2
The return for Source 1 Shutter and Sensor 1 Shutter would be: 1,1 2,5
To Set the same parameters you would send: H1 1,1 2,5
Get Num Channels
Command:
J
Description: Returns the number sensor/output channels installed.
Parameters: None
Example:
The J command returns either 2 or 4.