INFICON SQC-310 Thin Film Deposition Controller - Manual (Page 57)

Chapter 3 Menus
3-19
Xtal Fail Mode: Programs the action when the last sensor assigned to a film fails.
Selecting Halt stops the process. When Timed Power is selected, the instrument uses
the last valid rate, thickness, and power readings to calculate the time required to reach
final thickness. The power is fixed at the last valid reading and deposition continues for
the calculated time. Because there are no sensor readings, this is only a rough
estimate. The more stable the process, the more accurate the estimate.
Material: Selects a material assigned to this film. As materials change, their density
and Z-Factor are updated.
Density: Sets the density for this material. Material density has a significant impact on
deposition calculations.
Z-Factor: Sets the Z-Factor, an empirically determined measure of a material’s effect
on quartz crystal frequency change.
Ramp 1: Ramp power sets the power level desired at the end of the ramp phase, in %
of Scale 1,2. Ramp time sets the time to ramp linearly from the initial power to the Ramp
power. Soak time sets the time the output remains at the ramp power level.
Ramp 2: Ramp 2 functions are the same as Ramp 1. Typically, Ramp 2 power is set
near the power level required to achieve the desired initial deposition rate.
Feed: The feed phase holds output power at the level and time required to wire feed
new material.
Idle: Idle power ramps output power back to zero, or holds the material at a state that is
ready for deposition (usually the same as Ramp 2 power).
Shutter Delay: It is often desirable to obtain deposition control before the substrate
shutter opens. Enabling shutter delay requires that the system reach a specific capture
accuracy before the shutter opens. If the capture accuracy is not reached within the
shutter delay time, the process halts. Otherwise, the substrate shutter opens and
deposition begins when control accuracy has been maintained for 5 seconds. The
thickness reading is zeroed at the end of the shutter delay period.
Capture: The control accuracy (%) that must be reached to end the shutter delay.
Control Error: If the control loop cannot maintain the desired deposition rate, due to
loss of source material, excess rate ramps, or equipment malfunction, a control error
occurs. The error condition can be ignored, the process stopped (output power to 0%),
or the output power held at the same level as when the error occurred. If hold is
selected, PID control is abandoned, but the process will continue to be monitored for
thickness setpoint.