INFICON SQC-310 Thin Film Deposition Controller - Manual (Page 5)

Chapter 5 - Communications........................................................................................ 5-1
5.0 Introduction ......................................................................................................... 5-1
5.1 SQC300 COMM.EXE ......................................................................................... 5-1
5.2 Communications Protocol................................................................................... 5-1
5.3 SQC-300 Commands ......................................................................................... 5-3
Appendix
A. Material Parameters
B. Specifications
C. I/O Connections
D. Handheld Remote Controller
E. Declaration of Conformity