Appendix – INFICON SQC-310 Thin Film Deposition Controller User Manual
Page 86
Appendix
Formula
Density
Z-Ratio
Material Name
Ni
8910
0.331
Nickel
NiCr
8.500
*1.000
Nichrome
NiCrFe
8.500
*10~
Inconel
NiFe
8.700
*1.000
Permalloy
NiFeMo
8.900
*10~
Supermalloy
NiO
7.450
*1.000
Nickel Oxide
P
3
N
5
2.510
*1.000
Phosphorus Nitride
Pb
11.300
1.130
Lead
PbCl
2
5.850
*1.000
Lead Chloride
PbF
2
8.240
0.661
Lead Fluoride
PbO
9.530
*1.000
Lead Oxide
PbS
7.500
0.566
Lead Sulfide
PbSe
8.100
*1.000
Lead Selenide
PbSnO
3
8.100
*1.000
Lead Stannate
PbTe
8.160
0.651
Lead Telluride
Pd
12.038
0.357
Palladium
PdO
8.310
*1.000
Palladium Oxide
Po
9.400
*1.000
Polonium
Pr
6.780
*1.000
Praseodymium
Pr
2
O
3
6.880
*1.000
Praseodymium Oxide
Pt
21.400
0.245
Platinum
PtO
2
10.200
*1.000
Platinum Oxide
Ra
5.000
*1.000
Radium
Rb
1.530
2.540
Rubidium
Rbl
3.550
*1.000
Rubidium Iodide
Re
21.040
0.150
Rhenium
Rh
12.410
0.210
Rhodium
Ru
12.362
0.182
Ruthenium
S8
2.070
2.290
Sulphur
Sb
6.620
0.768
Antimony
Sb
2
O
3
5.200
*1.000
Antimony Trioxide
Sb
2
S
3
4.640
*1.000
Antimony Trisulfide
Sc
3.000
0.910
Scandium
Sc
2
O
3
3.860
*1.000
Scandium Oxide
Se
4.810
0.864
Selenium
Si
2.320
0.712
Silicon
Si
3
N
4
3.440
*1000
Silicon Nitride
SiC
3.220
*1.000
Silicon Carbide
SiO
2.130
0.870
Silicon (II) Oxide
SiO
2
2.648
1.000
Silicon Dioxide