Chapter 4 maintenance, Chapter 4 - maintenance – INFICON SQC-310 Thin Film Deposition Controller User Manual

Page 65

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Chapter 4

Maintenance

4-1

Chapter 4 - Maintenance

4.0 Introduction

This section covers maintenance, cleaning, software upgrades, and the installation of
optional accessories.

W

ARNING

: There are no adjustments or user-serviceable parts inside the SQC-300

Series controllers. For maintenance or repair, contact

Sigma Instruments
120 Commerce Drive, Unit 1
Fort Collins, CO 80524 USA
970-416-9660

4.1 Cleaning

Use a damp cloth, wetted with water or a mild detergent, to clean the outer surfaces.

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