INFICON SQC-310 Thin Film Deposition Controller - Manual (Page 80)

Chapter 5 Communications
5-12
Set Run State
Command: U
Description: Sets the instruments operating state.
Parameters:
0 = Start Process
31 = Soak/Hold
1 = Stop Process 32 = Zero Thickness
2 = Start Layer 33 = Zero Time
3 = Stop Layer 34 = Out 1 Pocket Ready
4 = Next Layer 35 = Out 2 Pocket Ready
5 = Force Final Thickness 36 = Out 3 Pocket Ready
6-30 = Start Process 1-25 37 = Out 4 Pocket Ready
Example: To start process 2, send: U7
Get Run State
Command: V
Description: Returns the Phase #, Process Elapsed Time (as shown on display),
Process #, and Active Layer of the active process.
Parameters:
0 = Stopped
10 = Soak 2 20 = Feed Ramp
1 = Crystal Verify 11 = Soak Hold 21 = Feed Soak
2 = Initialize Layer 12 = Shutter Delay 22 = Idle Ramp
3 = Manual Start Layer 13 = Deposit 23 = Start Next layer
4 = Crystal Rotate 14 = Rate Ramp 24 = Crystal Fail
5 = Pocket Rotate 15 = Rate Ramp Deposit 25 = Stop Layer
6 = PreCond (Codep only) 16 = Timed Power 26 = Manual Power
7 = Ramp1 17 = Rate Sample Delay 27 = Pocket Timeout
8 = Soak 1 18 = Rate Sample Sample 28 = Sample Hold
9 = Ramp 2 19 = Crystal Switch
Example: To read the run state, send: V
The return string for the Deposit Phase, Elapsed Time =15 seconds, Active
Process #1, Layer #2 is: 13 15 1 2