INFICON SQC-310 Thin Film Deposition Controller - Manual (Page 53)

Chapter 3 Menus
3-15
The parameters on the Film Edit Menu are those most commonly modified. Additional
film parameters are available by pressing Film Conds. and Deposit Controls. An
explanation of each parameter is listed at the end of this section.
I T e r m
F ilm T o o lin g 1 0 0
0 . 7
%
S e c .
F ilm E d it M e n u
F il m
C o n d s .
D e p o s it
C o n t r o ls
T o
M a i n
P r e v
M e n u
E d it
P r o c e s s 1 E d it in g : F ilm 1
P a r a m e t e r V a lu e U n it s
P T e r m 5 0 N o n e
D T e r m 0 . 0 S e c .
X t a l F a il M o d e
C r y s t a l S t a b ilit y
P o c k e t
C r y s t a l Q u a lit y
H a lt
D is a b le d
D is a b le d
N o n e
D e n s it y
M a t e r ia l
Z F a c t o r
2 . 7 3
1 . 0 8
A lu m in u m
g m / c c
Exit to Main Returns to the Main Menu.
Prev
Menu Returns to the Film Select Menu.
Edit Selects the highlighted parameter for edit. SoftKey functions
change to:
Next: Store parameter and move to next for editing.
Cancel: Stop editing and undo changes to selected parameter.
Enter: Stop editing and save values for selected parameter.
Control Knob: Turn to adjust value. Push to store value and
move to next parameter.
Film Conds. Displays pre/post conditioning settings (See 2.6).
Deposit Controls Displays deposition control settings (See 2.2).
Press Film Conds to display the Film Conditioning Menu.