INFICON SQC-310 Thin Film Deposition Controller - Manual (Page 63)

Chapter 3 Menus
3-25
In the I/O Setup Menu, any number of “events” can be mapped to the physical inputs
and relays. Options are set by selecting a relay or input and then turning the control
knob to select the desired event. The following table explains each event:
Inputs Explanation (low to high transition causes)
Start Process Start the process at Layer 1.
Abort Process Abort the process. Can only restart at Layer 1.
Start Layer Start the active layer.
Stop Layer Stop the active layer.
Start Next Layer Start the next layer.
Force Final Thickness End deposition.
Start Process 1-25 Start the selected process.
Soak Hold Delay the start of deposition.
Zero Thickness Reset thickness reading to zero.
Zero Time Reset time setpoint counter to zero.
Output Pocket Ready The output’s source indexer is on the desired pocket.
Multi Xtal Ready A multi-crystal sensor head is on the selected crystal.
None The input is not assigned.
Relays Explanation (closes when)
Source 1-4 Shutter Deposit phase for films set to Output.
Sensor 1-4 Shutter Shutter Delay and Deposit phases of films set to Sensor.
Sensor 1-4 Fail Sensor is assigned to this layer, and has failed.
All Crystal Good All sensors assigned to this layer are OK.
All Crystal Fail All sensors assigned to this layer have failed.
Process Hold Process is stopped (waiting for Start Layer).
Deposit Phase Process is in Deposit phase.
PreCond Phase Process is in Ramp1, Soak1, Ramp2, or Soak2 phase.
SoakHold Phase Process is in Soak/Hold phase.
Process Active Process is running (not stopped).
Manual Mode Process is in Manual mode (not under PID control).
Max Power Active output is at maximum power (out of material?).
Process Stopped Process is stopped (not running).
Time Setpoint The process has been in Deposit phase the indicated time.
Thickness Setpoint Thickness setpoint reached. Resets on start of next Layer.
Final Thickness Final thickness reached. Resets on start of next Layer.
Dual Crystal Shutter Primary sensor failed, switch to secondary.
Multi Xtal Move 1-4 1 sec. pulse to move a multi-crystal head to next position.
Output Pocket 1-8 Source pocket # (Single mode) or BCD bit # (Multi mode)
None The relay is not assigned to any event.