INFICON SQC-310 Thin Film Deposition Controller - Manual (Page 32)

Chapter 2 Operation
2-13
Press Stop to halt the current layer. You can restart the current layer pressing Start.
Press Next Layer, then Start, to start any other process layer.
Note: It is best (and safest!) to place the SQC-300 in Simulate mode when a process is
first run. If the bottom SoftKey does not show Start Simulate, press System Params
and turn Simulate Mode ON.
Enough preliminaries, let’s start the process!
Press Start to start deposition. If the first layer Start mode was programmed as
Manual, you will need to press the Start Layer SoftKey now to start the layer.
Preconditioning
Zero
Start
Layer
Next
Menu
Quick
Edit
Auto /
Manual
Process 1 : Layer 1 of 1 Run # :1
Start
0.0
50.0
100.0
0.0 6.2 12.5 18.8 25.0
Power ( % vs. Time)
Out#
1
2
3
4
Rate(A/S)
1.20
0.00
0.00
0.00
Dev( %)
00.0
00.0
00.0
00.0
Thick(kA)
0.085
0.000
0.000
0.000
Pow( %)
75.0
0.0
0.0
0.0
Soak 2 0:25:00
The process starts with the first layer preconditioning phase. When preconditioning is
complete, the deposition phase begins. The deposition phase ends when Final
Thickness is reached for the layer, then Feed and Idle phases run (if programmed).
If the second layer is Auto Start, its cycle begins immediately when the first layer is
complete. If the second Layer is Manual Start, or it’s the last layer in the process, the
process halts and waits for operator intervention.