INFICON SQC-310 Thin Film Deposition Controller - Manual (Page 54)

Chapter 3 Menus
3-16
The Film Conditioning Menu contains the power settings used before and after
deposition. Definitions of each parameter appears later in this section.
Ramp1 Time
Ramp2 Power
Ramp2 Time
Soak2 Time
Feed Power
Ramp Time
Feed Time
Idle Power
Ramp Time 0:00:00
0.0
0:00:00
0:00:00
0.0
0:00:05
0:00:05
50.0
0:00:10
%
h:mm:ss
h:mm:ss
h:mm:ss
h:mm:ss
%
h:mm:ss
Film Conditioning Menu
To
Main
Prev
Menu
Edit
Process 1 Editing: Film 1
Parameter Value Units
Ramp1 Power 25.0 %
Soak1 Time 0:00:05 h:mm:ss
%
h:mm:ss
Exit to Main Returns to the Main Menu.
Prev Menu Returns to the Film Edit Menu.
Edit Selects the highlighted parameter for edit. SoftKey functions
change to:
Next: Store parameter and move to next for editing.
Cancel: Stop editing and undo changes to selected parameter.
Enter: Stop editing and save values for selected parameter.
Control Knob: Turn to adjust value. Push to store value and
move to next parameter.