INFICON MDC-360C Thin Film Deposition Controller User Manual
Mdc-360c
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Table of contents
Document Outline
- Cover Page
- Title Page
- Trademarks
- Disclaimer
- Disclosure
- Copyright
- Declaration Of Conformity
- Warranty
- SAFETY PRECAUTION AND PREPARATION FOR USE
- SAFETY TERMS AND SYMBOLS
- Table Of Contents
- GENERAL DESCRIPTION
- PURPOSE
- FEATURES
- MULTI-CRYSTAL AVERAGING
- EXTENSIVE PROGRAM STORAGE
- DYNAMIC MEASUREMENT UPDATE RATE
- SUPERIOR COLOR GRAPHICS DISPLAY
- PROGRAM SECURITY
- DESIGNED FOR UNATTENDED OPERATION
- FAIL SAFE ABORTS
- ABORT STATUS RETENTION
- RUN COMPLETION ON CRYSTAL FAILURE
- POWERFUL SYSTEM INTERFACE
- POWER SUPPLY NOISE TOLERANCE
- INTERNATIONAL STANDARD POWER CONNECTOR
- FIELD UPGRADABLE
- SPECIFICATIONS
- ACCESSORIES
- FRONT PANEL DISPLAYS AND CONTROLS
- BENCH CHECKOUT & INSPECTION
- PROGRAMMING AND CONTROLLER SETUP
- OPERATING THE MDC-360C
- SIGN-ON SCREEN
- STARTING A NEW PROCESS
- STARTING A NEW LAYER
- RESUMING AN ABORTED OR HALTED PROCESS
- GRAPH DISPLAYS
- STATUS DISPLAYS
- VIEWING RESULTS
- MODES
- STATES
- TROUBLE, ERROR AND WARNING MESSAGES
- DESCRIPTION
- MIN RATE&MAX POWER
- MAX RATE&MIN POWER
- SYSTEM SETUP MEMORY CORRUPTED
- PROCESS MEMORY CORRUPTED
- MATERIAL MEMORY CORRUPTED
- RATE EST. ERROR
- CRYSTAL FAILURE
- SOURCE FAULT
- SENSOR FAULT
- NO SENSORS ENABLED
- TIME POWER
- RATE DEV. ALARM
- ALARM ACTION
- CRYSTAL MARGINAL
- RATE DEV. ALERT
- MAX POWER ALERT
- MIN POWER ALERT
- ALERT ACTION
- XTAL FAIL SWITCH
- XTAL MRGN SWITCH
- RATE DEV. ATTEN
- MAXIMUM POWER
- MINIMUM POWER
- CHANGE POCKET...
- CHANGE CRYSTAL...
- ATTENTION ACTION
- CALIBRATION DONE
- DESCRIPTION
- TUNING THE MDC-360C CONTROL LOOP
- INPUT/OUTPUT CHARACTERISTICS
- CONTROLLER INSTALLATION
- SYSTEM INSTALLATION
- THEORY OF OPERATION
- COMPUTER INTERFACE
- REPAIR AND MAINTENANCE
- APPENDIX A – MATING CABLE COLOR CODES
- APPENDIX B – PARAMETER TEMPLATES
- INDEX
- MENU MAPS