INFICON MDC-360C Thin Film Deposition Controller - Manual (Page 16)

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Table of Figures
FIGURE 2-1 OPERATING DISPLAY........................ ERROR! BOOKMARK NOT DEFINED.
FIGURE 2-2 PARAMETER/STATUS DISPLAY ...................................................................... 2-2
FIGURE 2-3 PROGRAMMING SECTION................................................................................. 2-4
FIGURE 2-4 ARROW KEYS....................................................................................................... 2-4
FIGURE 2-5 ALPHANUMERIC KEYBOARD .......................................................................... 2-5
FIGURE 3-1 REMOTE POWER HANDSET ............................................................................. 3-7
FIGURE 4-1 THE MAIN MENU................................................................................................ 4-1
FIGURE 4-2 SELECT PROCESS SCREEN..............................................................................4-14
FIGURE 4-3 DEFINE PROCESS SCREEN ..............................................................................4-14
FIGURE 4-4 SELECT LAYER MATERIAL SCREEN .............................................................4-16
FIGURE 4-5 SELECT MATERIAL SCREEN............................................................................4-16
FIGURE 4-6 DEFINE MATERIAL SCREEN ............................................................................4-17
FIGURE 4-7 SYSTEM SETUP MENU SCREEN .....................................................................4-25
FIGURE 4-8 DISPLAY SETUP SCREEN.................................................................................4-25
FIGURE 4-9 PROGRAM INPUT SCREEN ...............................................................................4-28
FIGURE 4-10 SELECT OUTPUT SCREEN .............................................................................4-29
FIGURE 4-11 PROGRAM OUTPUT SCREEN ........................................................................4-29
FIGURE 4-12 OUTPUT CONDITIONS SELECTION SCREEN ..............................................4-30
FIGURE 4-13 OUTPUT CONDITIONS SELECTION - SUB MENU.......................................4-31
FIGURE 4-14 ACTION SELECTION SCREEN ........................................................................4-34
FIGURE 4-15 PROGRAM ACTION SCREEN ..........................................................................4-34
FIGURE 4-16 SELECT DEFINED ACTION SCREEN .............................................................4-35
FIGURE 4-17 SENSOR SETUP SCREEN ................................................................................4-36
FIGURE 4-18 SOURCE SETUP SCREEN................................................................................4-39
FIGURE 4-19 DAC SETUP SCREEN .......................................................................................4-42
FIGURE 4-20 UTILITY SETUP SCREEN................................................................................4-43
FIGURE 5-1 SIGN-ON SCREEN ............................................................................................... 5-1
FIGURE 5-2 RUN PROCESS SELECTION SCREEN .............................................................. 5-2
FIGURE 5-3 RATE VS. TIME GRAPH ..................................................................................... 5-3
FIGURE 5-4 RATE DEVIATION VS. TIME GRAPH .............................................................. 5-3
FIGURE 5-5 THICKNESS VS. TIME GRAPH.......................................................................... 5-3
FIGURE 5-6 POWER VS. TIME GRAPH.................................................................................. 5-4
FIGURE 5-7 SOURCE/SENSOR STATUS SCREEN................................................................ 5-4
FIGURE 5-8 I/O STATUS SCREEN .......................................................................................... 5-5
FIGURE 5-9 VIEW RESULTS SCREEN ................................................................................... 5-6
FIGURE 5-10 RATE VS. TIME PROCESS LOG GRAPH ........................................................ 5-7
FIGURE 5-11 TYPICAL PROCESS PROFILE.........................................................................5-13
FIGURE 7-1 PASSIVE INPUT BUFFER CIRCUIT .................................................................. 7-3
FIGURE 7-2 ACTIVE INPUT BUFFER CIRCUIT..................................................................... 7-4
FIGURE 7-3 DAC OUTPUT CIRCUIT...................................................................................... 7-5
FIGURE 7-4 SENSOR INPUT BUFFER CIRCUIT .................................................................. 7-6
FIGURE 7-5 SOURCE OUTPUT DRIVER CIRCUIT............................................................... 7-7
FIGURE 8-1 POWER ENTRY MODULE................................................................................... 8-2
FIGURE 8-2 MDC-360C FRONT PANEL ................................................................................. 8-6
FIGURE 8-3 MDC-360C REAR PANEL ................................................................................... 8-7
FIGURE 8-4 DAC SOCKET CONNECTOR PIN OUT ............................................................. 8-8
FIGURE 8-5 SOURCE SOCKET CONNECTOR PIN OUT ...................................................... 8-8
FIGURE 8-6 D9S DTE REAR-PANEL RS-232 SOCKET CONNECTOR................................ 8-9
FIGURE 8-7 D37P DISCRETE I/O PLUG CONNECTOR ........................................................8-10
FIGURE 8-8 RJ11 FRONT PANEL RS-232 CONNECTOR ....................................................8-11
FIGURE 8-9 FRONT PANEL MANUAL POWER CONNECTOR .........................................8-11
FIGURE 8-10 MDC-360C TOP VIEW (COVER REMOVED) ................................................8-12
FIGURE 8-11 RECOMMENDED GROUNDING METHOD....................................................8-13
FIGURE 9-1 REMOVING THE CRYSTAL RETAINER ........................................................... 9-4
FIGURE 9-2 INSTALLING THE SENSOR CRYSTAL ............................................................. 9-4