INFICON MDC-360C Thin Film Deposition Controller - Manual (Page 63)

MDC-360C DEPOSITION CONTROLLER
PROGRAMMING AND CONTROLLER SETUP 4-23
⎟
⎟
⎠
⎞
⎜
⎜
⎝
⎛
⎟
⎟
⎠
⎞
⎜
⎜
⎝
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º º
c
s
ds
dc
Tooling
I
I
cos
cos
100 %
2
where:
dc= Distance from source to crystal.
ds = Distance from source to substrate.
φ c = The angle of the crystal off of normal from the source.
φ s = The angle of the substrate off of normal from the source.
This equation assumes the crystal face is perpendicular to the source.
Empirical calibration of the tooling factor is described in Section 10.6.2.
b. Weight (10.0 to 499.9)
This parameter sets the weight factor for a particular sensor. The Weight factor is
used to adjust the effect a sensor has on the average rate. Each sensor's affect on
the average rate is ratio of the sensor's weight divided by the total weight for all
enabled sensors. This parameter is irrelevant when only one sensor is enabled for
measurement. The default for this parameter is 100.0
c. Crystal Fail (NotUsed, Disable, HltLast, Halt, TimePwr, Switch)
This parameter defines how this sensor will be used and what the MDC-360C will
do if this sensor/crystal should fail during a deposit. The available options are as
follows:
1. Not Used - The sensor is not used for this material but may be used as a
backup sensor. If used as a backup and it fails, then it will be put into the
sensor auto complete mode until the end of the layer. In sensor auto
complete mode, the last measure rate for the sensor is used in the average
rate and thickness calculation until the layer is complete. The MDC-360C
will enter the Time Power mode if this sensor if the last to fail.
2. Disable - The sensor is enabled for measurement. The sensor will be
removed from the average measurement if it fails. The MDC-360C will
halt the process if this is the last sensor to fail.
3. HaltLast - The sensor is enabled for measurement. The sensor will be put
into sensor auto complete if it fails and the process will be halted if it is
the last sensor to fail.
4. Halt - The sensor is enabled for measurement but the process will be
halted if this sensor fails.
5. TimePwr - The sensor is enabled for measurement. The sensor will be put
into sensor auto complete if it fails and the MDC-360C will enter the Time
Power Mode if it is the last sensor to fail.