INFICON MDC-360C Thin Film Deposition Controller - Manual (Page 91)

MDC-360C DEPOSITION CONTROLLER
OPERATING THE MDC-360C 5-7
been plotted the layer number will be displayed in the upper right hand corner of
the screen. At this point you can press the Status key to switch between the four
graphs. You can also enter a different layer number to view another layer.
Figure 5-10 Rate vs. Time Process Log Graph
To return to the process log, press the Left-arrow key.
5.8 MODES
Modes are conditions that the controller can occupy. Some modes are indicated
by the LED’s behind the operating keys. Other modes are displayed in the top
right hand corner of the status display (Refer to Figure 5-3). These controller
modes are described below.
5.8.1 PROCESS READY
The Process Ready Mode indicates the MDC-360C has been reset and is awaiting
a Start key press. The yellow LED behind the Reset key, when illuminated,
indicates that the controller is in Process Ready Mode.
5.8.2 ABORT
The Abort mode is indicated by a red LED behind the Abort key as well as the
flashing of all of the numeric LED displays. In Abort Mode all displays and
operating keys, with the exception of the Start and Reset keys, are inoperative.
All source control outputs are forced to zero, the Abort relay is closed and all
discrete outputs are forced to open circuit. In addition, if the controller initiated
the abort then the condition which caused the abort will be displayed in the top
right hand corner of the Parameter/Status display. Exit from Abort Mode requires
either a Reset or Start key press. See also Section 5.4 for resuming an aborted
process. Refer to Table 5-1 for conditions that can cause an abort.
Sample Cr Lyr 001 (001-999)
10 Rate
0 1
Displays the current
process name.
Displays the current
layer material name. Displays the current
layer number. Displays the process
layer range.