INFICON MDC-360C Thin Film Deposition Controller - Manual (Page 80)

MDC-360C DEPOSITION CONTROLLER
PROGRAMMING AND CONTROLLER SETUP 4-40
of deposition, the controller will begin closing the source shutter this much time
before the target endpoint thickness is reached so the final thickness should be
very close to the target.
4. Control (Manual, Direct, BCD, Indv)
This parameter defines the type of pocket control utilized.
Manual, as it implies, means not under control of the MDC-360C. Under manual
control, the MDC-360C will stop the process upon the completion of the current
layer when the next layer requires a different pocket. A message prompting the
operator with the material required is displayed in the Parameter/Status window.
Once the pocket has been changed, the process is resumed by pressing the Start
key.
BCD and Indv are used when control is through an external pocket rotation
controller which accepts Binary Coded Decimal inputs or Individual switch
closures to select the pocket. The controller creates the number of outputs
required to interface with the external controller and sets the outputs as required
to signal a pocket change.
Direct is used when the actuating device is driven directly. In this case the
controller sets up one or two outputs, one for each available direction, to drive a
motor or solenoid.
5. Drive (Up, Down, Fast, Inline, Sngl Step, Dbl Step)
When the Control type is Direct, this parameter defines the drive method or
direction. For Sngl Step and Dbl Step drive types, the controller sets up one
output which is either singly or doubly pulsed to actuate a solenoid to sequentially
step the rotator to the desired position. For Up and Down drive types, the
controller sets up one output to control a drive motor which is turned on until the
rotator reaches the desired position. For Fast and Inline drive types, the controller
sets up a drive up and a drive down output. For the Fast drive type, the controller
determines the fastest direction to the target pocket position and turns on the
appropriate output. The Inline drive type informs the controller that continuous
travel in one direction is not possible. Therefore to get from position 6 to 1, the
direction must be down through 5, 4, etc. until 1 is reached.
The controller creates one or more of the following outputs depending on the
type:
Drive Up
Drive Down
Step
6. Feedback Type (Individual, BCD, Single Home, In Position, No Feedback)
This parameter defines the type of feedback for a multiple pocket source. The
three feedback types available are as follows:
Individual - Individual position feedback. This feedback type uses one input
for each pocket position in the source. All inputs are normally false (open